SIMOX SOI

Summary data SIMOX SOI  

Thickness target and corresponding uniformity information for 100 mm, 150 mm and 200 mm diameter wafers

Summary:

• Customized layer doping (degenerate to intrinsic)
• Proprietary process for minimizing defect densities
• Minimal added particles (monitored using Tencor 6220)
• Fast turnaround is standard