Product 3

Selective Epitaxial Growth
Key Features

Image courtsey Lucent Technology	Extensive experience with both selective and nonselective growth Experience with patterned thermal and deposited oxide, CVD and plasma nitride Develop custom process for each specification Experience managing loading effects Understand faceting, sidewall, and corner effects Customer choice: underfill, overfill, epitaxial lateral overgrowth Quantitative analysis with atomic force microscope
This is an example of a selectively-deposited layer. The nominally 0.8 um diameter 'hole' was filled with epitaxial silicon.

AFM image of two trenches


Trenches contain epitaxial silicon with intentional overgrowth: 100% selectivity achieved

Selective epitaxy in Silicon window

Pre-Epi		Post-Epi