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Home> Characterization
>Other
Other Tools |
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Laser particle counter - Tencor 6220 |
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Fourier Transform Infrared Spectrometer (FTIR) - Biorad
QS-408 ( two units) |
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Wafer bow and warp gauge - ADE 9500 |
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Four point probe - CDE (two units) |
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Visible/near IR spectrophotometer - FilmMetrics |
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Optical microscopes with Nomarski interface; bright
light inspection |
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